Description

H ere is a Nickel plated Aluminum air bearing and or vacuum plate. Measures app 9" x 9" x point 355 thick. Weighs app 2-3/4 pounds. Would be installed in a frame and air would move a Silicon wafer from one plate to this plate. Top of plate has two rows of twelve air holes, point 024 diameter at a 45 degree angle. Those top holes are a little hard to see in pics. I put a piece of 30 awg wire in one of the holes. There are 2 holes drilled thru length of plate. Those 2 holes are tapped 10-32 on the ends. The top air holes are drilled to the depth of the thru holes. The bottom of plate has two 10-32 thread holes. Those two holes are drilled up to the depth of the thru holes. Barbed fittings would be attached to bottom of plate for the incoming air. The thru holes would have set screws installed in the ends, with a little Loctite for sealing. Bottom of plate also has a 10-32 hole for attaching a fitting for the vacuum. The top of plate has grooves in the shape of a T, which would help spread the vacuum around bottom of wafer. You can use the plate either way. Air or vacuum lines attached to bottom holes and or center thru holes. I attached some barbed fittings just for reference. If using bottom holes, you will need to attach some standoffs on bottom of plate to allow for room for fittings. Last pic shows a standoff installed. Top also has five grooves on either side of air holes running length of plate. The grooves are app point 034 wide and 1/8" deep. Guides would be placed in one groove on either side, depending on size of wafer being used, 3" to 6". Will include a few anodized Aluminum guides as shown in pics. Will include three 10-32 Brass barbs for 1/16 ID tubing. Bottom of plate has two thru holes, countersunk, used for cap sensors, not included, for detecting wafer passing by. There are also a few threaded holes on bottom for attaching various brackets and regulators. Each corner has a 10-32 hole, used with set screws to level plate and then a countersunk thru hole for screws for attaching to frame. Not sure what other purposes you can use this for. You could maybe use plate as a vacuum chuck of some sort. I'm calling this used. Never used but a few scratches and smudges from storage. This was custom made so no mfg info or packaging. Free shipping via USPS or UPS Ground, depending on zip. If you have any questions or need more pics, please let me know. Thanks.